| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam condition adjustment method which is suitable for adjusting beam conditions at tilting of electron beam, and to provide a device that uses the method. SOLUTION: For the tilting angle adjustment for the beam and distortion adjustment for correcting image distortion, occuring at the time of tilting of the electron beam in a charged particle beam device which tilts the beam by a deflection device for tilting, for example, such adjustments are carried out by using a specific specimen such as a pyramid shaped sample; image processing is carried out so as to obtain the value of the tilting angle and distortion amount by acquiring images acquired before and after tilting; and according to a prescribed processing flow, adjustments of the tilting angle and distortion correction are automated. COPYRIGHT: (C)2006,JPO&NCIPI
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