| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost shape measuring apparatus having high measurement accuracy even though it is of a noncontact type and capable of simultaneously maintaining a wide measuring range, a characteristic of a noncontact type, and speeding up measurements. SOLUTION: The shape measuring apparatus is provided with a plurality of three-dimensional position sensors and comprises both a converting means for converting three-dimensional position data, surface data from each three-dimensional position sensor, into point data groups and a processing unit for measuring the shape of an object to be measured on the basis of the point data groups from the converting means. COPYRIGHT: (C)2006,JPO&NCIPI
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