| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method of a mold to which waste substances adhere, the method which can effectively remove the waste substances from the mold surface without causing corrosion or scratches on the mold surface, and to provide cleaning equipment to realize such a method. SOLUTION: The cleaning method uses, in cleaning the mold to which the waste substances adhere, an aqueous liquid containing 0.3-2 mass% of an oxidizing agent as the cleaning solvent and conducts the cleaning at 120-250°C while maintaining it in a liquid state. The cleaning equipment, which is the equipment for cleaning the mold having the waste substances attached thereto, is equipped with a cleaning vessel to place the mold therein, a supply means to supply the cleaning solvent to the cleaning vessel, a heating means to heat the cleaning solvent to 120-250°C while maintaining the liquid state, and a discharge means to discharge the waste cleaning liquid out of the cleaning vessel. COPYRIGHT: (C)2006,JPO&NCIPI
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