DEVICE FOR COATING BOTH SIDES OF A SUBSTRATE WITH A HYDROPHOBIC LAYER
摘要
Disclosed is a device for coating both sides of substrates (10) with a hydrophobic layer in a vacuum coating system (20). Said device comprises a substrate holder (26), on one side of which a first evaporator (48) is disposed for evaporating a substance that forms the hydrophobic layer. A second evaporator (50) is arranged on the side located opposite said one side.
申请公布号
WO2005098082(A3)
申请公布日期
2006.03.09
申请号
WO2005EP03432
申请日期
2005.04.01
申请人
CARL ZEISS VISION GMBH;LEYBOLD OPTICS GMBH;ZUELTZKE, WALTER;FUHR, MARKUS;WINTER, KARL-HEINZ;WICHT, MANFRED
