发明名称 OPTICAL DEVICE, SENSOR AND OPTICAL ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide an optical device or the like which is small in size, is excellent in responsiveness and is easily and inexpensively manufactured. SOLUTION: The optical device 100A is constituted by using an optical element 10 furnished with a fixed substrate 20 formed of a photonic crystal and a movable substrate 30. A waveguide 25 on the fixed substrate 20 and a waveguide 32 on the movable substrate 30 are provided by stacking together, and the movable substrate 30 is relatively moved with respect to the fixed substrate 20 with an actuator 40 under the state that an optical connection by evanescent light is possible. Thus, the quantity of light which is transmitted by an optical coupling between a waveguide 25 on the fixed substrate 20 and a waveguide 32 on the movable substrate 30 varies, and the light intensity of the light emitted from the waveguide 25 and the light intensity of the light emitted from the waveguide 32 or the like are controlled. By using the optical element 10, a high sensitivity sensor for detecting displacement, force, pressure and acceleration or the like are detected is, also composed. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006064977(A) 申请公布日期 2006.03.09
申请号 JP20040247022 申请日期 2004.08.26
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY;OLYMPUS CORP 发明人 IKEHARA TAKESHI;MAEDA RYUTARO;GOTO HIROSHI;MIHARA TAKASHI
分类号 G02B26/02;G01D5/353;G01L1/04;G01P15/03;G02B6/12;G02B26/08 主分类号 G02B26/02
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