| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of inspecting a light-receiving element having a light-receiving surface provided with a plurality of light receiving regions, and capable of easily positioning the light-receiving element and the irradiation position. SOLUTION: In the method for inspecting the light-receiving element, a longitudinal irradiation region 21 extended in a first direction X is irradiated with inspection light 12, a light-receiving part 20 is scanned with the inspection light 12 in a second direction Y so that over the whole region of the light-receiving part 20 is irradiated with the inspection light 12, and outputs from respective light-receiving regions 19 are detected over the scanning period. Since the irradiation region 21 is irradiated as the irradiation region 21, including not only one light-receiving area 19, but including a plurality of light-receiving regions 19, the positioning of these light receiving regions 19 and the irradiation region 21 can be performed easily. COPYRIGHT: (C)2006,JPO&NCIPI
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