| 摘要 |
PROBLEM TO BE SOLVED: To obtain a chemical pump in which a variable volume member can be prevented from being broken due to over swelling. SOLUTION: An inner side face 15a abutting against the outer side face 19a of a tublar diaphragm 19 at the initial position is provided in a pump housing 15. When the tublar diaphragm 19 tries to return back to the initial position, further deformation in the direction for expanding the volume of a pump chamber Po from the initial position is regulated. Consequently, over swelling of the tublar diaphragm 19 can be prevented and thereby breakage due to over swelling can be prevented. COPYRIGHT: (C)2006,JPO&NCIPI
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