发明名称 SPUTTER ION PUMP AND IMAGE DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a sputter ion pump which is small-sized and high in exhaust gas efficiency, and in which magnetic field shield characteristics is improved, and an image display device provided with the sputter ion pump. SOLUTION: The SIP 50 is provided with a pump container 51, a permanent magnet 54, a second cathode 55b, an anode 56, a magnetic body 59, an opening 52 formed in the pump container, an electric power supply terminal 57a, and an insulator 53. The electric power supply terminal 57a is connected to the anode 56, and inserted and penetrated through the opening 52. The insulator 53 is filled in the opening 52, surrounds the electric power supply terminal 57a, and airtightly seals the opening. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006066293(A) 申请公布日期 2006.03.09
申请号 JP20040249005 申请日期 2004.08.27
申请人 TOSHIBA CORP 发明人 KIYONO KAZUYUKI;SHIMADA YOSHIYUKI;NISHIMURA KOJI
分类号 H01J41/18;H01J29/94;H01J31/12 主分类号 H01J41/18
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