| 摘要 |
PROBLEM TO BE SOLVED: To provide a dryer capable of efficiently transferring heat to a drying object even in vacuum, of properly equalizing a temperature gradient by evenly heating the whole drying object, and of drying the drying object in a short time. SOLUTION: This dryer is provided with an airtight processing bath, a heating part for heating the processing bath, and a depressurizing device for depressurizing the inside of the processing bath. The inside of the processing bath is provided with: a screw pump part for carrying the drying object in the bottom of the processing bath to an upper part of the processing bath to discharge it from a discharge port in the upper part in drying it; zoning walls for partitioning and zoning a space formed between the screw pump and the inside surface of the processing bath into a plurality of zones in the cylindrical axis direction; and a blade rotation mechanism having agitating blades arranged rotatably around the axis of the processing bath on the upper surface side of the respective zoning walls. The respective zoning walls are used to prevent a dropping hole for dropping the drying object from axially overlapping on holes of the zoning walls adjacent to each other. COPYRIGHT: (C)2006,JPO&NCIPI
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