| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing an electrode body 1 which can securely prevent the surface of a secondary electrodeposition layer 17 becoming a scanning electrode 2 from being in a rugged shape. SOLUTION: This method comprises: a zero-order electroforming stage where a zero-order electrodeposition layer 6 is formed on the surface of a matrix 5; a patterning stage where a streak-shaped pattern resist 13 composed of a plurality of resist bodies 12 arranged with prescribed equal intervals is provided on the zero-order electrodeposition layer 6; a primary electrodepositing stage where primary electrodeposition layers 15 are formed on the surface not covered with the resist bodies 12 in the zero-order electrodeposition layer 6; a stage where barrier layers 16 are formed on the primary electrodeposition layers 15; a secondary electroforming stage where secondary electrodeposition layers 17 are formed on the barrier layers 16; a stage where a support 21 is formed so as to cover the secondary electrodeposition layers 17 and the resist bodies 12; a stage where a stacked body 20 composed of these electrodeposition layers 6, 15, barrier layers 16 or the like is peeled from the matrix 5; and an etching stage where the zero-order and primary electrodeposition layers 6, 15 are removed by etching. COPYRIGHT: (C)2006,JPO&NCIPI
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