METHOD AND APPARATUS FOR COATING LIQUID MATERIAL, ELECTRO-OPTICAL DEVICE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of coating a liquid material ensuring precision of the height and giving sharp columns of a fine diameter. SOLUTION: A liquid material L is discharged from a nozzle 25 of a discharging head 1 in columnar form and applied onto a substrate P. The method has a process of imparting light energy to the coated liquid material L. COPYRIGHT: (C)2006,JPO&NCIPI