| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that spin drying alone causes staining and contamination and thus needs wiping requiring high skill in conventional optical part holding devices based on three-point holding or having a through hole at the center, used in ultrasonic cleaning and spin drying of small optical parts, and to realize an optical part holding device capable of cleaning and drying a large number of optical parts at the same time without essential wiping work. SOLUTION: A peripheral through hole is formed in the inner peripheral section of an optical part holding device which has two or more optical part holding sections and a peripheral section of a two-step structure. A connection groove is formed between adjacent holding sections, and ends of the through holes and grooves are connected. Trough holes of two or more thin openings are formed in the optical part mounting section of the holding sections, and at least a pair of through holes are formed on the edge of the mounting sections, and cleaning and drying is carried out while the mounting sections retain optical parts so as to allow the parts to move freely without fixing. COPYRIGHT: (C)2006,JPO&NCIPI
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