| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor element having a reduced noise component and heightened detection accuracy. <P>SOLUTION: This tuning-fork type angular velocity sensor element has a driving electrode for exciting tuning fork vibration on both main surfaces of at least one tuning fork arm between a pair of tuning fork arms extending from a tuning fork base part of a tuning fork-shaped crystal piece, has sensor electrodes for detecting a Coriolis force on both sides of one tuning fork arm, and has a ground part for balance adjustment on a ridgeline part of one tuning fork arm. The ground part is constituted as a non-electrode part on the tip side of the tuning fork arm. The non-electrode part occupies one-third of the tuning fork arm from the tip, and the angular velocity sensor element is formed by bonding directly two tuning fork-shaped crystal pieces. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
