| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer for obtaining interference pattern signal with good S/N ratio with reduced bias component using light source of low coherence in the interferometer. SOLUTION: The interferometer comprises the light source 112, the reference means 114 for making a part of light flux from the light source 112 reference light and making the remaining flux irradiate the inspection surface 130a, the light path length adjusting means 118 for giving the light path length B to the two perpendicular linear polarization components for the measurement light flux again super-imposed the light flux from the light source 112 or the reference light with the measurement light reflected on the inspection surface 130a, the elimination means 120 for eliminating the linear polarization component of prescribed direction from the reference light and/or measurement light, the polarization light component extraction means 128 for making the reference light and the measurement light interference by extracting the common polarization component from the reference light included in the measurement light flux and the measurement light; and the imaging means 116 for imaging the interference pattern. Wherein, the component of the linear polarization component in which the light path length A is not canceled is eliminated from the reference light and/or measurement light by the light path length adjusting means 118. COPYRIGHT: (C)2006,JPO&NCIPI
|
