发明名称 METHOD FOR FORMING POLYUREA FILM, AND APPARATUS THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a method for forming a polyurea film which has the same stoichiometric composition ratio as in a used monomer, and to provide an apparatus for forming the polyurea film. SOLUTION: The method for forming the synthetic resin film by evaporating a raw monomer in a vacuum treatment chamber and polymerizing it on a substrate comprises: evaporating a diisocyanate compound of a raw monomer; and simultaneously reacting the vapor with introduced water. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006063393(A) 申请公布日期 2006.03.09
申请号 JP20040247477 申请日期 2004.08.26
申请人 ULVAC JAPAN LTD 发明人 TAKAHASHI YOSHIKAZU;IRIKURA HAGANE;HASEGAWA YOSHIO
分类号 C23C14/12 主分类号 C23C14/12
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