| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for holding a workpiece for film formation, which further decreases a distance between centers of rotating workpieces, further increases a revolution orbital diameter of the workpiece, and further increases the number of workpieces which can be PVD(physical vapor deposition)-treated at a time, in accordance with the size of the workpiece. SOLUTION: This workpiece-holding device has an unrotatable central gear 11; a rotatable table 12 installed coaxially with the central gear; a guide section 12B arranged at a peripheral part of the table 12; and a gear unit 20 arranged between the guide section 12B and the central gear 11. The gear unit 20 has a primary planet gear 21 so as to engage with the central gear 11, and a secondary planet gear 22 so as to engage with the primary planet gear 21. A piston ring 2 of the workpiece is mounted on a mounting base which rotates integrally with a rotating shaft 22A of the secondary planet gear 22. Spacers 23 are installed on the rotating shafts 22A, abut with the guide section 12B, and abut on each other. COPYRIGHT: (C)2006,JPO&NCIPI
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