| 摘要 |
PROBLEM TO BE SOLVED: To provide a detergent that enables surely preventing electrostatic charge, does not erode wiring etc., and enables producing electric/electronic components in a good yield. SOLUTION: This detergent comprises, as main components, (1) a hydrocarbon-based solvent of 93-100 mass%, (2) an organic solvent other than the hydrocarbon-based one of 0-7 mass% such as octanol, and (3) an organic onium salt represented by general formula (I) (wherein Z is N or P, R<SP>1</SP>-R<SP>4</SP>are each a 4-20C hydrocarbon group which may be substituted, and relative to R<SP>1</SP>-R<SP>4</SP>, the ratio of the carbon numbers of a group having the most carbon numbers to a group having the least carbon numbers is≤2, and X<SP>-</SP>is an anion represented by formula (II) (wherein A<SP>1</SP>, A<SP>2</SP>are each a fluoroacyl group etc.)) of 0.001-10 pts.mass based on the total of (1) and (2) of 100 pts.mass such as tetraoctyl ammonium-2, 2, 2-trifluoro-N-(trifluoromethane sulfonyl)acetamide. COPYRIGHT: (C)2006,JPO&NCIPI
|
