| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing method for a photosensitive ceramic sheet capable of adequately adhering with a support in a patterning process and easily peeling in a peeling process by reducing adhesiveness with the support. SOLUTION: This photosensitive ceramic sheet processing method comprises the patterning process in which a pattern is formed on a support-provided sheet laminating a photosensitive ceramic sheet containing at least a support, a photosensitive organic component and an inorganic powder, and the peeling process in which the photosensitive ceramic sheet is peeled off from the support, and the peeling process comprises active ray irradiation or heat treatment. COPYRIGHT: (C)2006,JPO&NCIPI |
