发明名称 |
PRINTED CIRCUIT BOARD, MANUFACTURING METHOD THEREOF, AND SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To allow a wiring pattern to be easily formed without reducing the thickness of the wiring pattern when a conductive metal layer is removed so as to efficiently manufacture a high-reliability printed circuit board reduced in variation in insulation resistance caused by migration. SOLUTION: A substrate film comprises a substrate metal layer and a conductive metal layer which are sequentially formed on at least one surface of an insulating film. On the surface of the conductive metal layer, a desired masking pattern is formed by exposing and developing a photosensitive resin layer. After selectively etching mainly the conductive metal layer by using the pattern as a masking material, an exposed substrate metal layer is removed by being continuously soft-etched while leaving the masking material in place. Subsequently, the formed wiring pattern is treated with a solution which contains an organic compound having a reductive property. COPYRIGHT: (C)2006,JPO&NCIPI
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申请公布号 |
JP2006066889(A) |
申请公布日期 |
2006.03.09 |
申请号 |
JP20050190375 |
申请日期 |
2005.06.29 |
申请人 |
MITSUI MINING & SMELTING CO LTD |
发明人 |
KURIHARA HIROAKI;YASUI NAOYA |
分类号 |
H05K3/06;C23F1/18;C23F1/26;C23F1/28;H01L21/60 |
主分类号 |
H05K3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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