| 摘要 |
PROBLEM TO BE SOLVED: To provide a method that allows a super-critical process to be conducted after a liquid process for drying with pattern deformation suppressed. SOLUTION: A transfer tray 103 is raised from a secondary treatment tank 102, the transfer tray 103 is filled with washing water 104, and then a board 111 is soaked into the above washing water 104. Next, isopropanol is poured into the above transfer tray 103 to replace washing water 104 in the transfer tray 103 with isopropanol, and then the transfer tray 103 is filled with isopropanol 105 so that the board 111 can be soaked in the isopropanol 105. Then, the transfer tray is accommodated in the reaction chamber of the super-critical process equipment 106. COPYRIGHT: (C)2006,JPO&NCIPI
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