| 摘要 |
PROBLEM TO BE SOLVED: To thin a green sheet that is related mainly to a ceramic green sheet for forming a dielectric laminated component. SOLUTION: In particular, the method of forming the green sheet 4 includes the steps of forming an amorphous inorganic dielectric layer 6 on a supporting film 3 by a sputtering process, and forming a seed crystal 7 in this amorphous inorganic dielectric layer 6. With this configuration, the amorphous inorganic dielectric layer of submicron units can be easily formed. Abnormal grain growth can be suppressed by arranging the seed crystal, and the accurate green sheet can be provided. COPYRIGHT: (C)2006,JPO&NCIPI
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