| 摘要 |
PROBLEM TO BE SOLVED: To selectively form an organic film in a desired region of a micromachine. SOLUTION: A substrate 101 formed with a movable part electrode 104, a supporting part 107 and a movable part 108 and a counter electrode made of platinum are immersed in electrodeposition solution containing sulfonium ions to be cationic species (INSULEED of Nippon Paint Co., Ltd, for instance), negative voltage is impressed on the movable part electrode 104, the supporting part 107 and the movable part 108, and positive voltage is impressed on the counter electrode. Namely, the movable part electrode 104, the supporting part 107 and the movable part 108 are made as negative electrode, the counter electrode is made as positive electrode to be immersed in electrodeposition solution, voltage is impressed by using a constant voltage source, and cationic electrodeposition is performed. COPYRIGHT: (C)2006,JPO&NCIPI
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