METHOD FOR PREDICTING DEPOSITED SHAPE OF THIN FILM AND METHOD FOR ANALYZING FLATTENING PROCESS,申请号JP19910273366-传众专利搜索

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发明名称	METHOD FOR PREDICTING DEPOSITED SHAPE OF THIN FILM AND METHOD FOR ANALYZING FLATTENING PROCESS
摘要
申请公布号	JPH0585891(A)	申请公布日期	1993.04.06
申请号	JP19910273366	申请日期	1991.09.25
申请人	RICOH CO LTD	发明人	SUZUKI EIKO
分类号	C23C16/52;C30B25/16;H01L21/00;H01L21/20;H01L21/205;H01L21/31;H05H1/46	主分类号	C23C16/52
代理机构		代理人
主权项
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