| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck by which a gradient force for adsorbing an insulating substrate is effectively generated at the substrate, and further an adsorbing surface is prevented from being damaged by a particle or a foreign material. SOLUTION: By setting a substrate 5 to be adsorbed on electrodes 3 and 4, the adsorptivity of the electrostatic chuck is raised. Further, by using titanium, a compound containing titanium, a titanium oxide or conductive ceramic such as titanium nitride or titanium carbide having superior abrasion resistance as the electrodes 3 and 4, durability for contact to the substrate 5 to be adsorbed and robustness to the foreign material such as the particles are maintained. COPYRIGHT: (C)2006,JPO&NCIPI |
