| 摘要 |
PROBLEM TO BE SOLVED: To provide cushion equipment selectively secured within a container and packing a disk such as a semiconductor wafer. SOLUTION: A cushion 40 includes a plurality of cushion members, each having two ends supported by a base, respectively. The cushion member has a stepped configuration between the two ends and angles between neighboring substantially liner portions of the stepped configuration change as the cushion member flexes in response to the engagement with a semiconductor within the container. Further, a contacting portion 90 the position of which has been adjusted and which is an angle between about 65°and about 180°apart is provided near the vertex between two neighboring linear portions of the cushion member. COPYRIGHT: (C)2006,JPO&NCIPI |
