| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent an increase in a time for adsorbing and holding a mask to a mask holding means of an irradiation device even if the mask is large. <P>SOLUTION: An opening 1a which is connected with an air supply source 10 through a pipe line 8 is formed in a work stage 1 and the pipe line 8 is provided with a switching valve 9. The mask 3 is placed on the work stage 1. When the mask 3 is placed on the work stage 1 and brought into contact with the mask holding means 4 by raising the work stage 1, the switching valve 9 is switched for communicating the opening 1a with the supply source 10. Air is blown to the mask 3 for pushing the mask 3 against the mask holding means 4. In this way, a force to press the mask 3 is increased and a force to eject the remaining air is exerted between the mask 3 and the mask holding means 4. Accordingly, a time can be shortened for adsorbing and holding the mask 3 to the mask holding means 4. In addition, instead of blowing air as described above, an atmosphere around the mask 3 can be depressurized. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
