PROBE NEEDLE, METHOD OF MANUFACTURING PROBE NEEDLE, AND METHOD OF MANUFACTURING THREE DIMENSIONAL SOLID STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a probe needle capable of easily forming a beam of an arbitrary complicated shape.

SOLUTION: In the method of manufacturing the probe needle having the beam and a contact disposed at the tip of the beam, an Si wafer 20 is prepared, a seed layer 21 is formed on the Si wafer 20, and a groove having a desired shape of the beam is formed on the layer by patterning a photo resist 23. After that, the shape of a desired beam is formed by burying the groove with metal plating layers 24a and 24b.

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