INDUCTOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an on-chip inductor having a small area occupied by a chip and capable of increasing a self-resonant frequency and a Q-value, and to provide its manufacturing method. SOLUTION: A right-handed spiral structure and a left-handed spiral structure arranged facing each other are wound around an axis in a horizontal direction to a semiconductor substrate. The central end of the right-handed spiral structure is connected with the central end of the left-handed spiral structure. Viewing from the direction of the winding axis, the direction of the current flowing in the right-handed spiral structure and the direction of the current flowing in the left-handed spiral structure are equal and their wirings are closely located each other. COPYRIGHT: (C)2006,JPO&NCIPI