| 摘要 |
PROBLEM TO BE SOLVED: To directly and accurately measure a distance between an upper electrode and a lower electrode. SOLUTION: The maintenance method of a semiconductor device includes a step of opposing the upper electrode 12 and the lower electrode 20, and a step of causing a protrusion 22b provided on the lower electrode 20 so that it can appear/disappear to protrude toward the upper electrode 12, bringing the protrusion 22b into contact with the upper electrode 12, and measuring the protruding quantity of the protrusion 22b thereby measuring the distance between the upper electrode 12 and the lower electrode 20. It may include, between the step of opposing the upper electrode 12 and the lower electrode 20 and the step of measuring the distance between the electrodes 12 and 20, a step of mounting a semiconductor substrate 1 on the lower electrode 20 while the protrusion 22b is embedded in the lower electrode 20, and a step of bringing the protrusion 22b into contact with the semiconductor substrate 1, thereby setting a reference point for measuring the distance. COPYRIGHT: (C)2006,JPO&NCIPI
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