| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin coating apparatus capable of easily forming a dye recording layer with uniform film thickness and reduced coating film defects on a substrate for optical disk production. SOLUTION: At the time of forming the dye recording layer by spin coating on the substrate, splash preventive rings 100 of an inverted conical shaped are disposed in two stages (100a and 100b) in a prescribed form on an inner side of a coating liquid scattering preventive wall 30 as members for catching a coating liquid for preventing adhesion of the excess coating liquid on the substrate surface and an exhaust means for exhausting the gas in the coating liquid scattering preventive wall 30 is provided. Even if the excess coating liquid during the spin coating is splashed by the coating liquid scattering preventive wall 30, the liquid can be caught by the splash preventive rings 100. COPYRIGHT: (C)2006,JPO&NCIPI
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