OPTICAL PART HOLDING DEVICE

摘要

PROBLEM TO BE SOLVED: To solve the problems that spin drying alone causes staining and contamination and needs wiping work requiring high skill and that conventional optical part holding devices cannot carry out ultrasonic cleaning/spin drying while holding two or more optical parts of different shapes and sizes with a single holding device and require many holding devices, in the conventional optical part holding devices based on three-point holding or having a through hole at the center, used in ultrasonic cleaning and spin drying of small optical parts. SOLUTION: A plurality of optical part holding sections are formed as variable optical part holding sections being variable in the size of the one side, and a groove extending from the inside to the outside is disposed in the outer peripheral section of an optical part holding section having a peripheral section of a two-step structure. Cleaning/drying is carried out while an optical part mounting section retains optical parts so as to allow the parts to move freely without fixing. COPYRIGHT: (C)2006,JPO&NCIPI