发明名称 |
Method for producing piezoelectric film actuator, and composite structure having piezoelectric layer |
摘要 |
A method for producing a piezoelectric film actuator is provided. This method includes the steps of preparing an intermediate transfer member having a porous layer formed thereon, with a vibrating plate and a piezoelectric layer being provided on the porous layer; bonding the vibrating plate to a nozzle substrate to form a composite structure; and separating the intermediate transfer member from the composite structure at the porous layer to transfer the vibrating plate and the piezoelectric layer to the nozzle substrate.
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申请公布号 |
US2006049723(A1) |
申请公布日期 |
2006.03.09 |
申请号 |
US20050218515 |
申请日期 |
2005.09.06 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
OKABE TAKEHITO;SATO NOBUHIKO;KUROTOBI MAKOTO;TAKEDA KENICHI;IFUKU TOSHIHIRO |
分类号 |
H01L41/08 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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