SUBSTRATE HOLDER, STAGE APPARATUS, AND EXPOSURE APPARATUS

摘要

A substrate holder holds a substrate in excellent flatness even at the peripheral edge section, surrounding suction space, of the holder. The substrate holder has a peripheral edge section (33) surrounding suction space (38) and a first support section (34) provided in the suction space (38) and supporting a substrate. The substrate holder also has a second support section (7) extending from the peripheral edge section (33) side to the first support section (34) side and supporting the substrate.