| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent heat generation from a pump during operation and reduce the size of the pump by eliminating an energizing means for performing operation of a volume variable member to an opposite pump chamber side. <P>SOLUTION: Discharge/suction operation of resist liquid R by the discharge pump 13 is performed by pressure adjustment of operation air using an electropneumatic regulator 51 adjustable to both positive and negative set pressures. This eliminates the necessity of a heat generating source such as a motor, and heat generation from the discharge pump 13 is prevented. The necessity of the energizing means such as a spring is also eliminated, by operating a flexible film to the opposite pump chamber side by setting inside of an operation chamber of the discharge pump 13 to be negative pressure. In addition, it is unnecessary to provide a constitution such as a switching means for switching positive pressure and negative pressure in piping connecting the electropneumatic regulator 51 to the discharge pump 13, and reduction of the size of the discharge pump 13 can be realized. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
