DISPLACEMENT ESTIMATION SYSTEM AND METHOD

摘要

A displacement estimation system (100 / 400 / 600) comprising a data acquisition system (106) and a processing system (108) is provided. The data acquisition system is configured to capture a first frame (112A) from a first substrate (102A) including a first pattern (104A) and a second substrate (102B) including a second pattern (104B) at a first time and capture a second frame (112B) from a third substrate (102A) including a third pattern (104A) and a fourth substrate (102B) including a fourth pattern (104B) at a second time subsequent to the first time. The first pattern and the third pattern are substantially identical, and the second pattern and the fourth pattern are substantially identical. The processing system is configured to calculate a first displacement (312) between the first pattern and the third pattern using the first frame and the second frame and calculate a second displacement (314) between the second pattern and the fourth pattern using the first frame and the second frame.