DISPLACEMENT ESTIMATION SYSTEM AND METHOD

摘要

A displacement estimation system (100 / 400 / 600) comprising a data acquisition system (106) and a processing system (108) is provided. The data acquisition system is configured to capture a first frame (112A) from a first substrate (102) including a first pattern (104) at a first time and capture a second frame (112B) from a second substrate (102) including a second pattern (104) at a second time subsequent to the first time. The first pattern and the second pattern are substantially identical. The processing system is configured to calculate a displacement (306) between the first pattern and the second pattern using the first frame and the second frame.