DESIGN RULE CHECKING SYSTEM

摘要

In a design rule checking system (10) for checking whether or not an integrated circuit design complies with design rules specifying limit values for respective geometric parameters, non-binary functions are used to model the way in which systematic yield loss varies with the value of the geometric parameters. This enables a value to be assigned to systematic yield loss in cases where the geometric parameter is compliant with the design rule but takes a value close to the design rule limit.