| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic structure having a cavity structure in the recess of a surface or in the surface formed of a sintered surface high in a flatness and a dimensional accuracy after calcining, in the ceramic structure consisting of a plurality of ceramic green sheets laminated and integrated through calcination. <P>SOLUTION: The ceramic structure is manufactured by a method wherein a resin sheet is disposed on a through hole formed at a site becoming a recess on the ceramic green sheet and a site becoming a cavity on the same, then a plurality of ceramic green sheets are laminated and the resin sheets are removed by thermal decomposition upon calcining the laminate of ceramic green sheets. In this case, the recesses and cavities are provided with the flatness of inner surfaces thereof not higher than 30 μm and the radius of curvature of a corner between mutual surfaces not longer than 50 μm under a condition that the inner surface is constituted of a sintered surface as it is. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
