| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a container for supporting thin sheets capable of preventing the ingress of particles in a container body 2 by reducing the deposition of particles in a space between the container body 2 and a lid 3. <P>SOLUTION: The container for supporting sheets keeps inside clean and stores semi-conductor wafers or the like. The container comprises the container body 2 to store the semiconductor wafers and the lid 3 to cover the container body 2, and a protective film 11 is provided to cover a space between the lid 3 and the container body 2. The protective film 11 is adhesive and easily attachable/detachable. The protective film 11 is formed in the size to cover the entire side surface of the lid 3 of the container body 2 to which the lid 3 is attached. By affixing the protective film 11, ingress of particles in the space between the container body 2 and the lid 3 is prevented, and the ingress of particles together with air to be sucked into the space can be prevented when the lid 3 is detached from the container body 2. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
