| 摘要 |
A nanoscopic tunnel is disclosed. The tunnel can be formed in or on a substrate, such as a semiconductor. Methods of making nanoscopic tunnels are provided. An article defining a nanoscopic tunnel is made by providing a substrate, providing a tunnel template of sacrificial material on the substrate, and covering the tunnel template with a material. The sacrificial material is removed from the article, forming a space between the covering material and the substrate. The space defines the nanoscopic tunnel. |
