| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a protection film material having high refractive index characteristics which can be used as a protection film material even when a liquid immersion medium having a refractive index higher (for example, ≥1.5 for exposure light at 193 nm wavelength) than the refractive index of water (about 1.44 for exposure light at 193 nm wavelength). <P>SOLUTION: A protection film is formed on the surface of an employed resist film by using a composition comprising an acrylic resin component with the properties of having substantially no compatibility with a liquid for resist film immersion, in particular, water and being soluble in alkali. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
