| 发明名称 |
Combining image imbalance compensation and optical proximity correction in designing phase shift masks |
| 摘要 |
This application includes techniques for applying image imbalance compensation by aperture sizing and optical proximity approximation in designing a phase mask.
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| 申请公布号 |
US2006051680(A1) |
申请公布日期 |
2006.03.09 |
| 申请号 |
US20040933948 |
申请日期 |
2004.09.03 |
| 申请人 |
TRITCHKOV ALEXANDER V;JEONG SEONGTAE |
发明人 |
TRITCHKOV ALEXANDER V.;JEONG SEONGTAE |
| 分类号 |
G06F17/50;G03F1/00 |
主分类号 |
G06F17/50 |
| 代理机构 |
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