| 摘要 |
A drive unit allowing ultraprecise positioning control of a movable member is provided. A drive unit includes an piezoelectric element which expands and contracts upon application of a voltage, a drive shaft fixed to one end of the piezoelectric element along expansion and contraction direction, a movable member which engages with the drive shaft by friction force and is driven along the drive shaft which is oscillated by the expanding and contracting piezoelectric element, and a drive circuit for applying a voltage to the piezoelectric element, in which the drive circuit changes a waveform of the voltage applied to the piezoelectric element so that the movable member is switched between high-speed drive and low-speed drive.
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