| 摘要 |
Coatings of metals, metal oxides and metal compounds may be deposited on a substrate by feeding a liquid material, which comprises a metal salt solution or an organo metallic compound, through a capillary tube, the solution or compounds being capable of pyrolysis, dripping the liquid into a heated zone provided in the reaction tube so as to form a gaseous material, and leading the gas to a reaction zone of said tube and pyrolysing the gas so as to deposit a desired product on a substrate present in the reaction zone, the gases being allowed to mix prior to entering the reaction zone when more than one liquid starting material is introduced into the heating zone. A carrier gas, which may be air so as to achieve a desired oxidation, may be introduced into the tube independently of the liquid material. The production of layers of tin oxide or mixed tin antimony oxides using SnCl4 solution, a mixed solution of SnCl4 and SbCl3 or [Sn(C4H9)4] and [Sb(C3H7)3] using air as a carrier gas are exemplified. |
