| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vertical heat treatment apparatus and a method of rapid heat reduction of its treatment container by which heat of an exhaust opening as well as the treatment container can be rapidly reduced and throughput can be improved. <P>SOLUTION: The vertical heat treatment apparatus 1 is provided with the treatment container 2 which accomodates an object w to be treated and heat-treats it, a main heater 7 having the function of rapid cooling which surrounds and heats the treatment container 2, the exhaust opening 6 which is bent and positioned above the treatment container 2 for connecting an exhaust pipe 5, and an auxiliary heater 20 which is placed for heating the exhaust opening part 6. The auxiliary heater 20 is provided with a movement mechanism 21 for pulling the auxiliary heater 20 away from the exhaust opening part 6 at the time of rapid cooling of the main heater 7, and a forced exhaust mechanism 22 for forcibly exhausting atmosphere around the exhaust opening part 6. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
