发明名称 SPUTTER ION PUMP AND IMAGE DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a thin type sputter ion pump and an image display device provided with the sputter ion pump. SOLUTION: The SIP 50 is provided with a pump container 51, a first magnetic material 54, a first cathode 55a, a second cathode 55b, a second magnetic material 56, an anode 59, and a permanent magnet 60. The permanent magnet 60 is installed opposedly to the anode at the outside of the diameter direction of the anode 59, and provided with an end part N which is opposed to a peripheral edge of the first cathode 55a and has a magnetic pole, and the other end part S which is opposed to a peripheral edge of the second cathode 55b and has a magnetic pole. The permanent magnet 60 forms a closed magnetic circuit together with the first magnetic material 54 and the second magnetic material 56. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006066211(A) 申请公布日期 2006.03.09
申请号 JP20040247056 申请日期 2004.08.26
申请人 TOSHIBA CORP 发明人 KIYONO KAZUYUKI;SHIMADA YOSHIYUKI;NISHIMURA KOJI
分类号 H01J41/18;H01J29/94;H01J31/12 主分类号 H01J41/18
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