摘要 |
PROBLEM TO BE SOLVED: To provide a thin type sputter ion pump and an image display device provided with the sputter ion pump. SOLUTION: The SIP 50 is provided with a pump container 51, a first magnetic material 54, a first cathode 55a, a second cathode 55b, a second magnetic material 56, an anode 59, and a permanent magnet 60. The permanent magnet 60 is installed opposedly to the anode at the outside of the diameter direction of the anode 59, and provided with an end part N which is opposed to a peripheral edge of the first cathode 55a and has a magnetic pole, and the other end part S which is opposed to a peripheral edge of the second cathode 55b and has a magnetic pole. The permanent magnet 60 forms a closed magnetic circuit together with the first magnetic material 54 and the second magnetic material 56. COPYRIGHT: (C)2006,JPO&NCIPI
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