发明名称 Projection exposure apparatus and method for producing a printed circuit board
摘要 A projection exposure apparatus and a method for producing a printed circuit board wherein, the whole pattern including pieces 10 and coupons 12 to be exposed on a print circuit board 2 is depicted on a photo mask 1 divided in six areas by divide line 19, the exposure will be made with respect to the each divided area of the photo mask 1 mounted on a movable photo mask stage 5 with using a masking device 3 masking other area than the exposing area.
申请公布号 EP1632812(A1) 申请公布日期 2006.03.08
申请号 EP20050016716 申请日期 2005.08.01
申请人 ADTEC ENGINEERING CO., LTD. 发明人 NAKAGAWA, WATARU;HASHIMOTO, KAZUNORI
分类号 G03F7/20;G03F1/14;H05K3/00 主分类号 G03F7/20
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