SUBSTRATE TRANSFER ROBOT COMPRISING MEANS FOR PREVENTING CONTAMINATION OF SUBSTRATE,申请号KR20040070368-传众专利搜索

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发明名称	SUBSTRATE TRANSFER ROBOT COMPRISING MEANS FOR PREVENTING CONTAMINATION OF SUBSTRATE
摘要
申请公布号	KR20060021578(A)	申请公布日期	2006.03.08
申请号	KR20040070368	申请日期	2004.09.03
申请人	JUSUNG ENGINEERING CO., LTD.	发明人	CHOI, JAE WOOK
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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