| 发明名称 |
SYSTEM FOR PREVENTING IMPROPER INSERTION OF FOUP DOOR INTO FOUP |
| 摘要 |
<p>An apparatus for preventing improper engagement of a pod door and a pod. Specifically, misalignment of at least one latch finger connected t the pod door with latch engagement slots in the pod prevents a pod door from mechanically engaging a pod.</p> |
| 申请公布号 |
EP1349794(A4) |
申请公布日期 |
2006.03.08 |
| 申请号 |
EP20010996246 |
申请日期 |
2001.12.11 |
| 申请人 |
ENTEGRIS CAYMAN LTD. |
发明人 |
BONORA, ANTHONY, C.;GALLAGHER, GARY, M.;NG, MICHAEL |
| 分类号 |
E05B65/02;H01L21/68;B65D45/28;B65D85/86;H01L21/673 |
主分类号 |
E05B65/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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