发明名称 |
Nozzle for injecting sublimable solid particles entrained in gas for cleaning a surface |
摘要 |
Disclosed is a nozzle for injecting sublimable solid particles, which is capable of minimizing consumption of the carrier gas and also maximizing cleaning efficiency. The nozzle comprises a base block having a space in which carrier gas is supplied through a gas supplying pipe; a sub-block having a space in which cleaning medium decompressed by a regulator is supplied through a cleaning medium supplying pipe; a first venturi block having a venturi path for adiabatically expanding the carrier gas supplied from the space of the base block, and a cleaning medium injection path communicating the venturi path and the space of the sub-block and the carrier gas passed through the venturi path; and a second venturi block having a venturi path for adiabatically expanding the mixed gas of the carrier gas and the cleaning medium.
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申请公布号 |
US7008306(B2) |
申请公布日期 |
2006.03.07 |
申请号 |
US20040469109 |
申请日期 |
2004.02.16 |
申请人 |
K.C. TECH CO., LTD. |
发明人 |
YOON CHEOL-NAM;KO SE-JONG |
分类号 |
B24C5/04;B24C1/00;B24C3/32;H01L21/304 |
主分类号 |
B24C5/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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